The MULTISEM design concept is based on an open parallel architecture consisting of a central supervisor control unit, and a network of analytical substations

Interferometry is a powerful technique that can be used for endpoint detection of planar layer and trench etching, or deposition

HORIBA Jobin Yvon ellipsometers combine two key elements: phase modulation and an entirely numerical data acquisition and processing system. It allows real-time ...

The John P Kummer group supplies test, metrology, inspection and reliability & failure analysis tools and equipment to the European semiconductor industry.